US Patent 7360422 Silicon inertial sensors formed using MEMS
Patent 7360422 was granted and assigned to University of Southern California on April, 2008 by the United States Patent and Trademark Office.
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Patent abstract
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane. Vibration cancellation may be provided.
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US Patent 07360422 Silicon inertial sensors formed using MEMS US Patent 7360422 Silicon inertial sensors formed using MEMS
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Patent Number
0736042200
Patent Number
736042200
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
073604220
Date of Patent
April 22, 2008
0Patent Application Number
112418690
Date Filed
September 30, 2005
0Official Website
Patent Primary Examiner
Edits on 28 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073604220
Date of Patent
April 22, 2008
0Patent Application Number
112418690
Date Filed
September 30, 2005
0Official Website
Patent Primary Examiner
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US Patent 07360422 Silicon inertial sensors formed using MEMS
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07360422
Date of patent
April 22, 2008
Patent application number
11241869
Date Filed
September 30, 2005
Patent primary examiner
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