US Patent 7360422 Silicon inertial sensors formed using MEMS
Patent 7360422 was granted and assigned to University of Southern California on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 30, 2005
Date of Patent
April 22, 2008
Patent Application Number
11241869
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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