US Patent 7368682 Processing apparatus

Patent 7368682 was granted and assigned to Disco Corporation on May, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Disco Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73686820

Patent Inventor Names

Hiroshi Morikazu0

Date of Patent

May 6, 2008

Patent Application Number

113137350

Date Filed

December 22, 2005

Patent Primary Examiner

‌

Geoffrey S. Evans

Patent abstract

A processing apparatus contains a holding member for holding a workpiece, and a laser beam shining member for shining a laser beam at the workpiece held on the holding member. The holding member has a holding plate and the workpiece is placed on the holding plate. The holding plate is composed of a plate-shaped body formed from polychlorotrifluoroethylene, and a film formed from polytetrafluoroethylene is superposed on an upper surface of the plate-shaped body.

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