US Patent 7368682 Processing apparatus
Patent 7368682 was granted and assigned to Disco Corporation on May, 2008 by the United States Patent and Trademark Office.
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Patent Inventor Names
Hiroshi Morikazu0
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Article (+480 characters)
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Patent abstract
A processing apparatus contains a holding member for holding a workpiece, and a laser beam shining member for shining a laser beam at the workpiece held on the holding member. The holding member has a holding plate and the workpiece is placed on the holding plate. The holding plate is composed of a plate-shaped body formed from polychlorotrifluoroethylene, and a film formed from polytetrafluoroethylene is superposed on an upper surface of the plate-shaped body.
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US Patent 07368682 Processing apparatus US Patent 7368682 Processing apparatus
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Patent Number
073686820
Patent Number
73686820
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Official Website
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Current Assignee
Patent Jurisdiction
Patent Number
073686820
Date of Patent
May 6, 2008
0Patent Application Number
113137350
Date Filed
December 22, 2005
0Official Website
Patent Primary Examiner
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US Patent 07368682 Processing apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07368682
Date of patent
May 6, 2008
Patent application number
11313735
Date Filed
December 22, 2005
Patent primary examiner
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