Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
R. Gregory Wolf0
Date of Patent
May 13, 2008
0Patent Application Number
111040930
Date Filed
April 11, 2005
0Patent Primary Examiner
Patent abstract
A measurement system for measuring aspects of a wafer combines an apparatus for performing a conductivity measurement, such as a four-point probe system, with apparatus for performing an optical measurement, such as a photoacoustic measurement system. Results are obtained and combined to provide comprehensive data sets describing the characteristics of the thin film substrate therein.
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