US Patent 7372584 Dual photo-acoustic and resistivity measurement system
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Patent Inventor Names
R. Gregory Wolf0
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Patent abstract
A measurement system for measuring aspects of a wafer combines an apparatus for performing a conductivity measurement, such as a four-point probe system, with apparatus for performing an optical measurement, such as a photoacoustic measurement system. Results are obtained and combined to provide comprehensive data sets describing the characteristics of the thin film substrate therein.
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US Patent 07372584 Dual photo-acoustic and resistivity measurement system US Patent 7372584 Dual photo-acoustic and resistivity measurement system
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Patent Number
073725840
Patent Number
73725840
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Patent Jurisdiction
Patent Number
073725840
Date of Patent
May 13, 2008
0Patent Application Number
111040930
Date Filed
April 11, 2005
0Official Website
Patent Primary Examiner
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US Patent 07372584 Dual photo-acoustic and resistivity measurement system
Infobox
Is a
Patent jurisdiction
Patent number
07372584
Date of patent
May 13, 2008
Patent application number
11104093
Date Filed
April 11, 2005
Patent primary examiner
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