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US Patent 7372634 Reticle-masking objective with aspherical lenses

Patent 7372634 was granted and assigned to Carl Zeiss SMT on May, 2008 by the United States Patent and Trademark Office.

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Patent abstract

A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.

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