US Patent 7372634 Reticle-masking objective with aspherical lenses
Patent 7372634 was granted and assigned to Carl Zeiss SMT on May, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 21, 2006
0
Date of Patent
May 13, 2008
0
Patent Application Number
11534022
0
Patent Inventor Names
Jorg Schultz
0
Karl-Heinz Schuster
0
Alexander Epple
0
Alexander Sohmer
0
Johannes Wangler
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7372634 Reticle-masking objective with aspherical lenses
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
