Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jeffrey Alan Hawthorne0
M. Brandon Steele0
Date of Patent
May 27, 2008
0Patent Application Number
115044860
Date Filed
August 15, 2006
0Patent Primary Examiner
Patent abstract
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
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