US Patent 7381452 Amorphous hydrogenated carbon film
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Patent Inventor Names
Giuseppe A. Cirino0
Luiz Goncalves Neto0
Luiz S. Zambom0
Patrick B. Verdonck0
Ronaldo D. Mansano0
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Patent abstract
The present invention concerns an improved process for the deposition of amorphous hydrogenated carbon film, more specifically an improved low temperature, low power and low vacuum cathodic sputtering process. The invention also concerns the film produced by said process and articles containing an amorphous hydrogenated carbon film coating.
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US Patent 07381452 Amorphous hydrogenated carbon film US Patent 7381452 Amorphous hydrogenated carbon film
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Patent Number
07381452
Patent Number
7381452
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Official Website
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US Patent 07381452 Amorphous hydrogenated carbon film
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Is a
Patent jurisdiction
Patent number
07381452
Date of patent
June 3, 2008
Patent application number
10487031
Date Filed
May 8, 2002
Patent primary examiner
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