Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wai-Kin Li0
Haining Yang0
Date of Patent
June 10, 2008
0Patent Application Number
115526410
Date Filed
October 25, 2006
0Patent Primary Examiner
Patent abstract
A semiconductor structure including at least one transistor located on a surface of a semiconductor substrate, wherein the at least one transistor has a sub-lithographic channel length, is provided. Also provided is a method to form such a semiconductor structure using self-assembling block copolymer that can be placed at a specific location using a pre-fabricated hard mask pattern.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
