Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masamitsu Itoh0
Hideaki Sakurai0
Ikuo Yoneda0
Date of Patent
June 24, 2008
Patent Application Number
10969017
Date Filed
October 21, 2004
Patent Primary Examiner
Patent abstract
A developing method comprises determining in advance the relation of resist dissolution concentration in a developing solution and resist dissolution speed by the developing solution, estimating in advance the resist dissolution concentration where the resist dissolution speed is a desired speed or more from the relation, and developing in a state in which the resist dissolution concentration in the developing solution is the estimated dissolution concentration or less.
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