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US Patent 7395611 System processing a substrate using dynamic liquid meniscus

Patent 7395611 was granted and assigned to Lam Research on July, 2008 by the United States Patent and Trademark Office.

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Patent abstract

A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

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