US Patent 7395611 System processing a substrate using dynamic liquid meniscus
Patent 7395611 was granted and assigned to Lam Research on July, 2008 by the United States Patent and Trademark Office.
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Patent Inventor Names
Carl Woods0
Fred C. Redeker0
James P. Garcia0
John M. de Larios0
Michael Ravkin0
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Patent abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
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US Patent 07395611 System processing a substrate using dynamic liquid meniscus US Patent 7395611 System processing a substrate using dynamic liquid meniscus
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Patent Number
07395611
Patent Number
7395611
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Official Website
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US Patent 07395611 System processing a substrate using dynamic liquid meniscus
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Is a
Current assignee
Patent jurisdiction
Patent number
07395611
Date of patent
July 8, 2008
Patent application number
11525278
Date Filed
September 21, 2006
Patent primary examiner
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