Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sidlgata V. Sreenivasan0
Date of Patent
July 8, 2008
0Patent Application Number
104236420
Date Filed
April 25, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides a method for forming a stepped structure on a substrate that features transferring, into the substrate, an inverse shape of the stepped structure disposed on the substrate.
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