Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 8, 2008
Patent Application Number
11602475
Date Filed
November 21, 2006
Patent Primary Examiner
Patent abstract
The invention relates to a radiation system for generating a beam of radiation. The radiation system includes an extreme ultraviolet source constructed and arranged to generate extreme ultraviolet radiation, a contamination barrier constructed and arranged to trap contamination from the radiation source, and a temperature sensor constructed and arranged to sense a temperature of the contamination barrier.
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