US Patent 7397538 Radiation system and lithographic apparatus
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Patent abstract
The invention relates to a radiation system for generating a beam of radiation. The radiation system includes an extreme ultraviolet source constructed and arranged to generate extreme ultraviolet radiation, a contamination barrier constructed and arranged to trap contamination from the radiation source, and a temperature sensor constructed and arranged to sense a temperature of the contamination barrier.
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US Patent 07397538 Radiation system and lithographic apparatus US Patent 7397538 Radiation system and lithographic apparatus
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Patent Number
0739753800
Patent Number
739753800
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Patent Jurisdiction
Patent Number
073975380
Date of Patent
July 8, 2008
0Patent Application Number
116024750
Date Filed
November 21, 2006
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
073975380
Date of Patent
July 8, 2008
0Patent Application Number
116024750
Date Filed
November 21, 2006
0Official Website
Patent Primary Examiner
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US Patent 07397538 Radiation system and lithographic apparatus
Infobox
Is a
Patent jurisdiction
Patent number
07397538
Date of patent
July 8, 2008
Patent application number
11602475
Date Filed
November 21, 2006
Patent primary examiner
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