Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Atsuko Yamaguchi0
Osamu Komuro0
Hiroshi Fukuda0
Hiroki Kawada0
Date of Patent
July 29, 2008
0Patent Application Number
118086270
Date Filed
June 12, 2007
0Patent Primary Examiner
Patent abstract
A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.