US Patent 7405835 High-accuracy pattern shape evaluating method and apparatus

Patent 7405835 was granted and assigned to Hitachi on July, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Atsuko Yamaguchi0

Hiroki Kawada0

Hiroshi Fukuda0

Osamu Komuro0

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Patent abstract

A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.

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https://pdfpiw.uspto.gov/.piw?Docid=074058350

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