Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Terunori Warabisako0
Hiroki Nakamura0
Masakiyo Matsumura0
Date of Patent
August 5, 2008
0Patent Application Number
111878500
Date Filed
July 25, 2005
0Patent Primary Examiner
Patent abstract
A method of manufacturing a semiconductor device includes irradiating a region to be crystallized of a non-monocrystalline semiconductor film with laser beam modulated by an optical modulator to have light intensity distribution having a minimum light intensity line or minimum light intensity spot to crystallize the region, and heating the crystallized region by irradiating light from a flash lamp onto the crystallized region.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
