US Patent 7407873 Method of manufacturing semiconductor device
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Patent Inventor Names
Hiroki Nakamura0
Masakiyo Matsumura0
Terunori Warabisako0
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Patent abstract
A method of manufacturing a semiconductor device includes irradiating a region to be crystallized of a non-monocrystalline semiconductor film with laser beam modulated by an optical modulator to have light intensity distribution having a minimum light intensity line or minimum light intensity spot to crystallize the region, and heating the crystallized region by irradiating light from a flash lamp onto the crystallized region.
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US Patent 07407873 Method of manufacturing semiconductor device US Patent 7407873 Method of manufacturing semiconductor device
Infobox
Patent Number
074078730
Patent Number
74078730
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Patent Jurisdiction
Patent Number
074078730
Date of Patent
August 5, 2008
0Patent Application Number
111878500
Date Filed
July 25, 2005
0Official Website
Patent Primary Examiner
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US Patent 07407873 Method of manufacturing semiconductor device
Infobox
Is a
Patent jurisdiction
Patent number
07407873
Date of patent
August 5, 2008
Patent application number
11187850
Date Filed
July 25, 2005
Patent primary examiner
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