Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Roman Windpassinger0
Frank Simon0
Date of Patent
August 5, 2008
0Patent Application Number
113505140
Date Filed
February 9, 2006
0Patent Primary Examiner
Patent abstract
In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.
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