Patent 7408714 was granted and assigned to Coherent (operating system) on August, 2008 by the United States Patent and Trademark Office.
In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.