Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
August 26, 2008
Patent Application Number
11168160
Date Filed
June 28, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides atomic layer deposition systems and methods that include metal compounds with at least one β-diketiminate ligand. Such systems and methods can be useful for depositing metal-containing layers on substrates.
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