Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 26, 2008
Patent Application Number
10518463
Date Filed
May 27, 2003
Patent Primary Examiner
Patent abstract
The present invention relates to a composition for the removal of so-called “sidewall residues” from metal surfaces, in particular from aluminium or aluminium-containing surfaces, in particular from aluminium or aluminium-containing surfaces, during the production of semiconductor elements.
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