US Patent 7417016 Composition for the removing of sidewall residues
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Patent abstract
The present invention relates to a composition for the removal of so-called “sidewall residues” from metal surfaces, in particular from aluminium or aluminium-containing surfaces, in particular from aluminium or aluminium-containing surfaces, during the production of semiconductor elements.
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US Patent 07417016 Composition for the removing of sidewall residues US Patent 7417016 Composition for the removing of sidewall residues
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Patent Number
0741701600
Patent Number
741701600
Edits on 30 Mar, 2023
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Patent Jurisdiction
Patent Number
074170160
Date of Patent
August 26, 2008
0Patent Application Number
105184630
Date Filed
May 27, 2003
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
074170160
Date of Patent
August 26, 2008
0Patent Application Number
105184630
Date Filed
May 27, 2003
0Official Website
Patent Primary Examiner
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US Patent 07417016 Composition for the removing of sidewall residues
Infobox
Is a
Patent jurisdiction
Patent number
07417016
Date of patent
August 26, 2008
Patent application number
10518463
Date Filed
May 27, 2003
Patent primary examiner
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