Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles C Haluzak0
Arthur Piehl0
Chien-Hua Chen0
Jennifer Shih0
Date of Patent
August 26, 2008
Patent Application Number
11192377
Date Filed
July 29, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
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