Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 23, 2008
Patent Application Number
11019440
Date Filed
December 21, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.
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