US Patent 7427868 Active wafer probe
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Patent abstract
A probe suitable for probing a semiconductor wafer that includes an active circuit. The probe may have a rigid probing member and include a flexible interconnection between the active circuit and a support structure. The active circuit may have a relatively low capacitance as seen by the device under test.
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US Patent 07427868 Active wafer probe US Patent 7427868 Active wafer probe
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Patent Number
0742786800
Patent Number
742786800
Edits on 25 Mar, 2023
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Patent Jurisdiction
Patent Number
074278680
Date of Patent
September 23, 2008
0Patent Application Number
110194400
Date Filed
December 21, 2004
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
074278680
Date of Patent
September 23, 2008
0Patent Application Number
110194400
Date Filed
December 21, 2004
0Official Website
Patent Primary Examiner
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US Patent 07427868 Active wafer probe
Infobox
Is a
Patent jurisdiction
Patent number
07427868
Date of patent
September 23, 2008
Patent application number
11019440
Date Filed
December 21, 2004
Patent primary examiner
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