Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Beom-Suk Ma0
Date of Patent
September 30, 2008
Patent Application Number
11144386
Date Filed
June 2, 2005
Patent Primary Examiner
Patent abstract
A plasma processing system includes a plasma processing chamber and a plasma confining portion for defining a plasma confined area in the processing chamber. The plasma confining portion includes a plurality of spaced-apart segments arranged in a structural array. An X-axis control portion is provided for moving the plasma confining portion in a direction to expand or contract the plasma confining area. The plasma confining portion typically includes a plurality of confining members disposed one another in a vertical plane and spaced from each other.
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