US Patent 7429306 Plasma processing system
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Beom-Suk Ma0
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Patent abstract
A plasma processing system includes a plasma processing chamber and a plasma confining portion for defining a plasma confined area in the processing chamber. The plasma confining portion includes a plurality of spaced-apart segments arranged in a structural array. An X-axis control portion is provided for moving the plasma confining portion in a direction to expand or contract the plasma confining area. The plasma confining portion typically includes a plurality of confining members disposed one another in a vertical plane and spaced from each other.
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US Patent 07429306 Plasma processing system US Patent 7429306 Plasma processing system
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Patent Number
07429306
Patent Number
7429306
Edits on 14 Jun, 2022
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US Patent 07429306 Plasma processing system
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Is a
Patent jurisdiction
Patent number
07429306
Date of patent
September 30, 2008
Patent application number
11144386
Date Filed
June 2, 2005
Patent primary examiner
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