Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 4, 2008
Patent Application Number
11426822
Date Filed
June 27, 2006
Patent Primary Examiner
Patent abstract
An exemplary method includes: providing a substrate with an exposed metal surface, performing a reducing process on the metal surface, and transferring the substrate in an inert or reducing ambient to a chamber for that is used for metal layer deposition.
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