Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 18, 2008
Patent Application Number
11092822
Date Filed
March 30, 2005
Patent Primary Examiner
Patent abstract
An apparatus for coating a photoresist onto a substrate includes a slit nozzle to apply the photoresist to the substrate, a slit nozzle driving unit to move the slit nozzle, and a photoresist supply unit connected to the slit nozzle to supply the photoresist to the slit nozzle.
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