US Patent 7452422 Apparatus for coating photoresist having slit nozzle
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Patent abstract
An apparatus for coating a photoresist onto a substrate includes a slit nozzle to apply the photoresist to the substrate, a slit nozzle driving unit to move the slit nozzle, and a photoresist supply unit connected to the slit nozzle to supply the photoresist to the slit nozzle.
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US Patent 07452422 Apparatus for coating photoresist having slit nozzle US Patent 7452422 Apparatus for coating photoresist having slit nozzle
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Patent Number
0745242200
Patent Number
745242200
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Official Website
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Infobox
Is a
Patent Jurisdiction
Patent Number
074524220
Date of Patent
November 18, 2008
0Patent Application Number
110928220
Date Filed
March 30, 2005
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
074524220
Date of Patent
November 18, 2008
0Patent Application Number
110928220
Date Filed
March 30, 2005
0Official Website
Patent Primary Examiner
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US Patent 07452422 Apparatus for coating photoresist having slit nozzle
Infobox
Is a
Patent jurisdiction
Patent number
07452422
Date of patent
November 18, 2008
Patent application number
11092822
Date Filed
March 30, 2005
Patent primary examiner
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