US Patent 7453160 Simplified wafer alignment
Patent 7453160 was granted and assigned to Axcelis Technologies on November, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 23, 2004
Date of Patent
November 18, 2008
Patent Application Number
10830734
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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