Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sun-Kyu Kim0
Kwang-Ho Han0
Date of Patent
December 2, 2008
0Patent Application Number
107759580
Date Filed
February 9, 2004
0Patent Primary Examiner
Patent abstract
The disclosure is a baking apparatus including a susceptor, lift pins, and guiding blocks positioned at the edge of the susceptor to lead a wafer to be exactly positioned on the susceptor. The guiding blocks are linearly movable within a range of a semidiameter of a plate. A wafer is partially mounted on a wafer guide, being inclined against the susceptor, and thereby may heats uniformly.
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