US Patent 7458762 Apparatus and method for positioning semiconductor substrate
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Patent Inventor Names
Kwang-Ho Han0
Sun-Kyu Kim0
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Patent abstract
The disclosure is a baking apparatus including a susceptor, lift pins, and guiding blocks positioned at the edge of the susceptor to lead a wafer to be exactly positioned on the susceptor. The guiding blocks are linearly movable within a range of a semidiameter of a plate. A wafer is partially mounted on a wafer guide, being inclined against the susceptor, and thereby may heats uniformly.
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US Patent 07458762 Apparatus and method for positioning semiconductor substrate US Patent 7458762 Apparatus and method for positioning semiconductor substrate
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Patent Number
074587620
Patent Number
74587620
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Patent Jurisdiction
Patent Number
074587620
Date of Patent
December 2, 2008
0Patent Application Number
107759580
Date Filed
February 9, 2004
0Official Website
Patent Primary Examiner
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US Patent 07458762 Apparatus and method for positioning semiconductor substrate
Infobox
Is a
Patent jurisdiction
Patent number
07458762
Date of patent
December 2, 2008
Patent application number
10775958
Date Filed
February 9, 2004
Patent primary examiner
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