Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
James Word0
Date of Patent
December 2, 2008
0Patent Application Number
110674660
Date Filed
February 24, 2005
0Patent Primary Examiner
Patent abstract
A method for compensating for optical distortions occurring in regions associated with non-phase-shifting regions in a mask or reticle. OPC or other resolution enhancement techniques are performed on one or more edge segments associated with adjacent phase-shifting regions in order to compensate for edge position errors occurring in areas corresponding to non-phase-shifting regions.
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