US Patent 7459248 Performing OPC on structures with virtual edges
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Patent Inventor Names
James Word0
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Patent abstract
A method for compensating for optical distortions occurring in regions associated with non-phase-shifting regions in a mask or reticle. OPC or other resolution enhancement techniques are performed on one or more edge segments associated with adjacent phase-shifting regions in order to compensate for edge position errors occurring in areas corresponding to non-phase-shifting regions.
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US Patent 07459248 Performing OPC on structures with virtual edges US Patent 7459248 Performing OPC on structures with virtual edges
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Patent Number
074592480
Patent Number
74592480
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Patent Jurisdiction
Patent Number
074592480
Date of Patent
December 2, 2008
0Patent Application Number
110674660
Date Filed
February 24, 2005
0Official Website
Patent Primary Examiner
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US Patent 07459248 Performing OPC on structures with virtual edges
Infobox
Is a
Patent jurisdiction
Patent number
07459248
Date of patent
December 2, 2008
Patent application number
11067466
Date Filed
February 24, 2005
Patent primary examiner
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