Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nicolas Bright0
S. M. Reza Sadjadi0
Date of Patent
December 16, 2008
Patent Application Number
11126466
Date Filed
May 10, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for generating a plurality of reticle layouts is provided. A feature layout with a feature layout pitch is received. A plurality of reticle layouts is generated from the feature layout where each reticle layout of the plurality of reticle layouts has a reticle layout pitch and where each reticle layout pitch is at least twice the feature layout pitch.
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