US Patent 7468110 Hollow cathode target and methods of making same

Patent 7468110 was granted and assigned to Cabot Corporation on December, 2008 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Cabot Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74681100

Patent Inventor Names

Robert B. Ford0

Christopher A. Michaluk0

Date of Patent

December 23, 2008

Patent Application Number

110910290

Date Filed

March 28, 2005

Patent Primary Examiner

‌

John P. Sheehan

Patent abstract

Sputtering targets and methods of making sputtering targets are described. The method includes the steps of: providing a sputtering metal workpiece made of a valve metal; transverse cold-rolling the sputtering metal workpiece to obtain a rolled workpiece; and cold-working the rolled workpiece to obtain a shaped workpiece. The sputtering targets exhibits a substantially consistent grain structure and/or texture on at least the sidewalls.

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