US Patent 7468326 Method of cleaning a wafer
Patent 7468326 was granted and assigned to United Microelectronics Corporation on December, 2008 by the United States Patent and Trademark Office.
Is a
Date Filed
August 24, 2005
Date of Patent
December 23, 2008
Patent Application Number
11161961
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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