US Patent 7476949 Low compressive TiN

Patent 7476949 was granted and assigned to Texas Instruments on January, 2009 by the United States Patent and Trademark Office.

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Date of Patent

January 13, 2009

Patent Application Number

11183046

Date Filed

July 15, 2005

Patent Primary Examiner

Patent abstract

Disclosed herein is a microelectromechanical device having a structural layer composed of a low stress TiNx layer and a method of making the same.

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