US Patent 7476949 Low compressive TiN
Patent 7476949 was granted and assigned to Texas Instruments on January, 2009 by the United States Patent and Trademark Office.
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Patent abstract
Disclosed herein is a microelectromechanical device having a structural layer composed of a low stress TiNx layer and a method of making the same.
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Official Website
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US Patent 07476949 Low compressive TiN US Patent 7476949 Low compressive TiN
Infobox
Patent Number
0747694900
Patent Number
747694900
Edits on 31 Mar, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074769490
Date of Patent
January 13, 2009
0Patent Application Number
111830460
Date Filed
July 15, 2005
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074769490
Date of Patent
January 13, 2009
0Patent Application Number
111830460
Date Filed
July 15, 2005
0Official Website
Patent Primary Examiner
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US Patent 07476949 Low compressive TiN
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07476949
Date of patent
January 13, 2009
Patent application number
11183046
Date Filed
July 15, 2005
Patent primary examiner
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