Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ernst Keller0
Quanyuan Shang0
Date of Patent
February 3, 2009
0Patent Application Number
108695630
Date Filed
June 15, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.
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