Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoichi Kurosawa0
Seiichi Nakamura0
Tomoji Watanabe0
Tsuneo Hayashi0
Akira Bando0
Hideki Nishihata0
Kazunori Tsubuku0
Kazuo Mera0
...
Date of Patent
February 3, 2009
0Patent Application Number
115102770
Date Filed
August 24, 2006
0Patent Primary Examiner
Patent abstract
This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
