US Patent 7485874 Apparatus for manufacturing semiconductor substrates

Patent 7485874 was granted and assigned to SUMCO on February, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names

Akira Bando0

Hideki Nishihata0

Kazunori Tsubuku0

Kazuo Mera0

Nobuo Tsumaki0

Riyuusuke Kasamatsu0

Seiichi Nakamura0

Tomoji Watanabe0

Tsuneo Hayashi0

Yoichi Kurosawa0

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Patent abstract

This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=074858740

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