Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cherie R Kagan0
Laura Louise Kosbar0
Tricia Breen Carmichael0
Date of Patent
February 17, 2009
0Patent Application Number
107617980
Date Filed
January 21, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention provides a method of forming a patterned thin film on a surface of a substrate having thereon a patterned underlayer of a self-assembled monolayer. The method comprises depositing a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate. The present invention further provides processes for preparing the self-assembled monolayer. The present invention still further provides solution-based deposition processes, such as spin-coating and immersion-coating, to deposit a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate.
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