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US Patent 11857997 Metal surface protection

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

George Gabriel Totir0

Ali Afzali-Ardakani0

David L. Rath0

Sarunya Bangsaruntip0

Date of Patent

January 2, 2024

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Patent Application Number

169054630

Date Filed

June 18, 2020

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Patent Citations

US Patent 7491286 Patterning solution deposited thin films with self-assembled monolayers

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US Patent 9691987 Self-assembly of nanostructures

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US Patent 6974726 Silicon wafer with soluble protective coating

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US Patent 8658258 Plasma treatment of substrates prior to the formation a self-assembled monolayer

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Patent Citations Received

US Patent 12006384 Random copolymer and pinning composition comprising the same

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Patent Primary Examiner

Michael P. Rodriguez

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Patent abstract

Techniques regarding methods and/or apparatuses for protecting metal substrates during one or more lithography processes are provided. For example, one or more embodiments described herein can comprise a method that can include coating a metal substrate with a polymer film that self-assembles on a metal oxide positioned on a surface of the metal substrate. The method can also include covalently bonding the polymer film to the metal oxide.

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