US Patent 11857997 Metal surface protection
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US Patent 11857997 Metal surface protection
Article
Patent abstract
Techniques regarding methods and/or apparatuses for protecting metal substrates during one or more lithography processes are provided. For example, one or more embodiments described herein can comprise a method that can include coating a metal substrate with a polymer film that self-assembles on a metal oxide positioned on a surface of the metal substrate. The method can also include covalently bonding the polymer film to the metal oxide.
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Patent Inventor Names
Ali Afzali-Ardakani0
David L. Rath0
George Gabriel Totir0
Sarunya Bangsaruntip0
Date of Patent
January 2, 2024
0Patent Application Number
169054630
Date Filed
June 18, 2020
0Patent Citations
0
Patent Primary Examiner
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